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AlN granule

ALN granule is made by spray granulation of ALN powder, containing binder and sintering aids, which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.

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Product characteristics

High Purity

1

Ready for press

2

High strength

3

High sintering activity

4

High fluidity

5

技術(shù)參數(shù)


項目Item

GS-80

平均粒徑 Mean particle size (μm) 

70~120

Y2O3 (WT%)

5

松裝密度 Bulk density (g/cm3)

0.8~1.0

流動性 Fluidity (s/50g)

80~100

雜質(zhì)含量
Impurity

Ca (ppm)

＜500

Si (ppm)

<100

Fe (ppm)

<30

成形工藝



脫脂工藝


200℃前3℃/ min ，400℃前2℃/ min，500℃前5℃/ min ，保溫2小時。

燒結(jié)溫度1830~1900℃，保溫時間3~5 hrs,流動氮氣，0.1MPa

產(chǎn)品應用

壓制陶瓷原料：加熱器/靜電吸盤/刻蝕防護罩/熱壓氮化鋁陶瓷


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